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Real-life Savings: Novellus Systems, Inc.
Real-life Savings
High-technology company strives for energy leadership.
Real-life Savings: Novellus Systems, Inc.

Novellus Systems, Inc., is a leader in advanced manufacturing equipment for the global semiconductor industry, so it’s no stranger to competition. Now the company is staking out a leadership position in energy-efficiency, as well.

Facilities Manager Mike Halvorson is overseeing a multi-phase energy management upgrade. Novellus recently installed a variable frequency drive on a cooling tower at the company’s Tualatin campus as part of the production facility’s chilled water system.

Real-life results at Novellus
Measures implemented
  • Variable frequency drive installed on one of two cooling tower fans
  • High-efficiency motor
  • Software to optimize chiller loading and condenser water temperature

Estimated annual energy savings
  • 265,700 kilowatt hours

Financial incentives
  • Energy Trust of Oregon incentive — $26,893

Project costs
  • $53,786

Payback after incentives and tax credits
  • 1.6 years
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